Characteristics silicon pressure sensor using dry etching technology
نویسندگان
چکیده
منابع مشابه
Dry Etching Based Silicon Micromachining
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ژورنال
عنوان ژورنال: Journal of Sensor Science and Technology
سال: 2010
ISSN: 1225-5475
DOI: 10.5369/jsst.2010.19.2.137